Ultrasonic Sputtering Target Cleaning Machine

MECS TECH’ offers Ultrasonic Sputtering Targtet Cleaning Machine.

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Thông số kỹ thuật
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MECS TECH’ Ultrasonic Sputtering Targtet Cleaning Machine provides perfect cleaning of sputtering target using our own ultrasonic cleaning concept compared to conventional ultrasonic cleaning process using dipping bath type.

Thông số kỹ thuật

Model No.	Single axis Driven Type
Ultrasonic Frequency	20 KHz ± 1 KHz
Ultrasonic Output	2,000 Watt (Max)
Main Power	220V / 1 phase
Bath Size	Designed based on customer’s target size
Horn Size	Max 420mm / one Horn
Pneumatic system for Head up-down Driven	Over 3 bar
Cleaning Liquid Filtering System	2 stage filtering (1 um)
Cleaning Horn X Axis Movement	Driven by induction Motor
Cleaning Horn Z Axis (Up-down) Movement	Driven by pneumatic system
Major Features
Target Load & Unload	Manual
Cleaning Counter Set	Available
Dry system	No
Cleaning Liquid Recycling & Filtering System	Yes
Filter Replacement Time Control	Yes
Cleaning Speed	Adjustable (Max : about 2M /min)
Control System	PLC

Model No.	Two axis Driven Type
Ultrasonic Frequency	20 KHz ± 1 KHz
Ultrasonic Output	2,000 Watt (Max)
Main Power	220V / 1 phase
Bath Size	Designed based on customer’s target size
Horn Size	Max 420mm / one Horn
Cleaning Liquid Filtering System	3 stage filtering (0.5 um)
Cleaning Horn X Axis Movement	Driven by Servo Motor
Cleaning Horn Z Axis Movement	Driven by Servo system
Major Features
Target Load & Unload	Automatically load & unload by Roller system
Cleaning Counter Set	Available
Dry system	Yes
Cleaning Liquid Recycling & Filtering System	Yes
Filter Replacement Time Control	Yes
Cleaning Speed	Adjustable (Max : about 2M /min)
Horn Movement according to target surface	Yes (Even though target surface is not plain, Horn automatically moves above target surface with maintaining equal distance between Horn and target surface)
Control System	PLC, Touch Panel